Customer challenge
Qualify extremely thin pellicles measuring deflection at low delta pressures in an ultra-clean environment.
The product is an extremely thin membrane with a defined elasticity. The tool applies a controlled delta pressure profile and measures the deflection of the membrane. The product is used inside the scanner and must remain particle free during the test sequence.
Our competence expertise
- Full tool life cycle (design, built, qualify, maintain)
- Clean room compatible design
- Low particle generation
- Accurate pressure measurement
- Accurate distance measurement
- Flow control
- Safety regulations (CE, SemiS2)
- Labview programming, data collection and reporting
- Human Machine Interface design
The test set-up is placed inside a dedicated down flow cabinet to limit particle generation in the work area. The air that is used to apply the delta pressure is filtered (<10 nm). All materials and moving parts are designed to avoid praticle generation to the product. The air flow desin and the control system are designed to generate delta pressures with <1 Pa accuracy. The labview operating system enables an operator to perfom standard tests and allows the process engineer to define the test recipes. The tool is equipped with a diagnostic tool validation system.
Other competences used in solution:
- Safey regulations (CSA)